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Low Pressure Plasma Cleaner: Advanced Surface Treatment Technology

Low-Pressure Plasma Surface Treatment is a core technology in modern manufacturing, delivering atomic-level surface cleaning and activation. It is the standard solution for improving adhesion of adhesives, coatings, and paints in electronics, medical, and precision industries. Explore COUSZ’s advanced low-pressure plasma equipment to optimize your production processes.


1. What is Low-Pressure Plasma Cleaner? How Does It Work?

Low-Pressure Plasma Treatment utilizes the fourth state of matter—plasma—to modify the chemical and physical properties of material surfaces in a vacuum environment, typically ranging from 0.1 to 10 Pa.

In this process, the material is placed inside a sealed vacuum chamber. After evacuation, the working gas (such as argon, oxygen, or gas mixtures) is energized using radio-frequency (RF) or microwave power to generate plasma. This produces highly reactive species, including ions, electrons, and free radicals.

Key advantages over atmospheric plasma:

  – Superior uniformity: Low-pressure plasma allows particles to move freely with fewer collisions, ensuring even treatment across complex structures, microholes, and 3D details.

  – Precise process control: By adjusting the type and concentration of reactive species via working gases, treatment intensity and deposition can be customized for specific materials.


2. Core Functions of Low-Pressure Plasma Equipment

Low-pressure plasma systems provide three primary benefits for surface treatment:

2.1 Surface Cleaning

This is a dry cleaning process, eliminating ultra-thin organic contaminants such as oils, silicones, or fingerprints at the atomic level without chemical solvents.

Mechanism: Reactive species (e.g., active oxygen) oxidize organic contaminants into CO₂ and H₂O, which are then removed by vacuum pumping.

2.2 Surface Activation

Low-pressure plasma introduces polar functional groups (-OH, -NH₂) onto material surfaces, significantly increasing surface energy. This improves wettability and provides strong chemical bonding sites for adhesives, coatings, or inks.

2.3 Plasma Coating / Deposition

Low-pressure plasma systems can deposit functional thin films through Plasma-Enhanced Chemical Vapor Deposition (PECVD). Examples include:

  – Anti-wear coatings

  – Hydrophobic layers

  – Biocompatible functional coatings
These coatings enhance product longevity and performance.


3. COUSZ Low-Pressure Plasma Equipment

COUSZ offers specialized Low-Pressure Plasma Surface Treatment Systems, designed to meet diverse technical requirements from basic cleaning to advanced coating applications.

3.1 CVP 2mm Low-Pressure Plasma Cleaning Machine

Function: Focuses on fundamental surface cleaning and activation. Ideal for removing organic contaminants prior to adhesive bonding, printing, or soldering.
Features: Uses working gases like oxygen or argon. The compact chamber is suitable for small batches or precision components, ensuring high cleanliness and uniformity—perfect for R&D and mid-scale production.

3.2 DC500S 2.5mm Low-Pressure Plasma Surface Treatment System

Function: Versatile system capable of cleaning, activation, and basic plasma coating.
Features: Advanced gas flow control using gas mixtures and precise RF power management allows tailored treatment for specific materials.

3.3 CVP 2.5mm Atmospheric/Low-Pressure Plasma Cleaner

Function: Specialized for PECVD processes, introducing precursors into the vacuum chamber to deposit functional thin films.
Features: Includes precursor delivery and temperature-controlled chambers. Ideal for anti-scratch, hydrophobic, or protective coatings on optical and electronic components.


4. Technical Advantages and Industry Applications

Low-pressure plasma systems offer unmatched uniformity, temperature control, and material compatibility:

4.1 High Treatment Uniformity and Temperature Control

All parts in a batch receive consistent plasma exposure, ensuring repeatability and uniform quality. The process does not significantly increase material temperature, protecting sensitive components.

4.2 Applications in Advanced Industries

  – Medical & Biomedical: Absolute cleaning and activation of implants and medical devices.

  – Optics & Electronics: Plasma coating systems apply functional layers on lenses, displays, and touch panels.

  – Aerospace & Composites: Surface preparation for adhesives on composite materials requiring maximum bonding strength.


5. Choosing the Right Low-Pressure Plasma System

Key factors when investing in a low-pressure plasma system:

  – Gas and pressure control: Must include Mass Flow Controllers (MFCs) for precise gas delivery.

  – Chamber design and power source: RF power should be adjustable to control surface energy effectively.

  – Recipe programming and storage: Advanced systems offer user-friendly software to store and replicate optimized treatment recipes.


6. COUSZ – Trusted Provider of Low-Pressure Plasma Systems

COUSZ delivers comprehensive Low-Pressure Plasma Surface Treatment Solutions, from basic cleaning to advanced PECVD coating systems.

Flagship models include:

  – CVP 2mm Low-Pressure Plasma Cleaning Machine for precise cleaning and activation

  – CVP 2.5mm Atmospheric/Low-Pressure Plasma Cleaner for advanced functional film deposition

Our commitment:

  – Equipment Quality: All systems meet rigorous quality standards.

  – Expert Support: COUSZ engineers provide process optimization for your specific materials.

If you seek to improve adhesion, cleanliness, and durability of your products, contact COUSZ for professional consultation and detailed quotations for models like CVP 2mm or CVP 2.5mm.

Jet Plasma Treatment Systems

CD-500 Plasma Surface Cleaner

Low Pressure Plasma Cleaner

CD-800 Plasma Surface Cleaner